The processing methods of pvd coating machine of different processes are different. Inadvertent small faults may affect the normal operation of the entire machine and equipment. Problems need to be checked one by one. Experienced masters can often solve many problems. Speaking of the uniformity of the coating, this is one of the criteria for evaluating the quality of a pvd coating machine. In the process of machine coating, to deal with the uneven coating of vacuum coating equipment, it is necessary to investigate the problems that may affect the uniformity of the coating layer, and the inspection and repair are completed before mass production. All coating equipment will be affected by some conditions that affect the uniformity of the coating layer. Take magnetron sputtering pvd coating machine as a brief example:
The work of magnetron sputtering coating is not complicated. By equipping an efficient and stable sputtering source, the target is bombarded in a certain vacuum environment in the coating chamber to decompose the target. This is a PVD physical process. Atoms are deposited on the surface of the product by the process to form a film. During the reaction process, the effects of the uniformity of the magnetic field, the pressure-holding condition of the vacuum environment, and the protective gas on the uniformity of the film should be considered. However, some uneven changes in the film layer may also be caused by the instability of the sputtering source or the target, which is more difficult to handle.
It should be known that no matter the accuracy of the monitor that comes with the coating equipment, it can only control the thickness of the film at a single point in the coating room, which generally refers to the middle of the product. By controlling the uniformity of the film at the base point, it can ensure that the product is far away from this base point. uniformity of the film.
The vacuum environment is controlled by pumping. To maintain a stable vacuum degree at all times requires an accurate detection and control system. When the vacuum degree reaches the required state, the pumping needs to be stopped. If the vacuum degree will be lower than the required state, it needs to be pumped in time. stabilized. The coating vacuum degree has a reasonable range. The smaller the difference in this range, the greater the required accuracy, the more difficult the control, and the better and more stable the relative voltage regulation; If the pressure is low, the relative pressure fluctuation is larger, and the influence on the uniformity of the film layer is larger.
In the past few years, more and more customers have higher and higher requirements for
pvd coating machine, especially in terms of film density and uniformity quality. For the manufacturers of coating machines to improve their own process technology is a guarantee of competitiveness.