The technology of pvd coating machine has become an indispensable part of people's life, affecting people's lifestyle. For example, in daily life, tableware, household, building materials, electronic products, packaging and other surfaces are coated with a layer of film, which changes the performance of the product as well as its beauty. With the progress of society, the technology of pvd coating machine is also changing with each passing day. Optical coating technology, winding coating technology, decorative coating technology and magnetic control coating technology have already been put into market in large quantities to meet the current market demand. Many people outside the industry have a question in their mind, which structure is the vacuum coating machine composed of? The following is a collection of materials in this field for your reference and study.

1、 Vacuum chamber and coating equipment mainly include continuous coating production line and single chamber coating machine, stainless steel material manufacturing, argon arc welding, chemical polishing treatment on the surface, and various flange interfaces are welded on the vacuum chamber components.
2、 The vacuum obtaining part is an important part of vacuum technology. Vacuum can not be obtained by one vacuum equipment and method. Several pumps must be used together, such as mechanical pump, Roots pump, molecular pump system, etc.
3、 The vacuum measurement part, the vacuum measurement part of the vacuum system, is to measure the pressure in the vacuum chamber. Like the vacuum pump, no vacuum gauge can measure the whole vacuum range, so people have made many kinds of vacuum gauges according to different principles and requirements. Such as thermocouple meter, ionization meter, Pirani meter, etc.
4、 In the power supply part, the target power supply mainly includes DC power supply, intermediate frequency power supply, pulse power supply, and radio frequency power supply (RF). Common power supply manufacturers include AE, ADL, and Houttinger
5、 The process gas is input into the system. The process gas, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., is generally supplied by the gas cylinder, through the gas pressure reducing valve, gas stop valve, pipeline, gas flow meter, solenoid valve, piezoelectric valve, and then into the vacuum chamber. The advantages of this gas input system are that the pipeline is simple and fast, and it is easy to maintain or replace the cylinder. Each coating machine does not affect each other. There is also the case that several coating machines share a group of gas cylinders, which may be seen in some large-scale coating workshops. Its advantages are to reduce the consumption of gas cylinders and to make unified planning and layout. The disadvantage is that due to the increase of joints, the chance of air leakage increases. In addition, the coating machines will interfere with each other, and the pipeline leakage of one coating machine may affect the product quality of other coating machines. In addition, when replacing gas cylinders, it is necessary to ensure that all machines are in non gas use state.
6、 For the mechanical transmission part, the coating must have uniform thickness around, so there must be three rotations during the coating process to meet the requirements. That is, while the large worktable is required to rotate (I), the small worktable also rotates (II), and the workpiece itself can rotate simultaneously (III). In terms of mechanical design, there is generally a large driving gear at the bottom center of the large workpiece turntable, with some small star wheels meshing with it. If the product rotation is to be achieved, the fork is generally used to shift the workpiece rotation.
7、 The coating equipment for heating and temperature measurement generally has heaters at different positions, and the temperature is measured and controlled by thermocouples. However, since the thermocouple clamping position is different from the workpiece position, the temperature reading cannot be the true temperature of the workpiece. In order to measure the real temperature of the workpiece, there are many ways to install high temperature test paper or thermocouple on the workpiece.
8、 Ion evaporation and sputtering source. The evaporation source of multi arc plating is generally circular cake, commonly known as circular cake target, or rectangular multi arc target. The target base is equipped with a magnet. By moving the magnet back and forth, the magnetic field strength can be changed to adjust the moving speed and track of the arc spot. In order to reduce the temperature of the target and target base, the target base shall be continuously filled with cooling water. In order to ensure the high conductivity and thermal conductivity between the target and the target seat, a tin gasket can be added between the target and the target seat. Generally, rectangular or cylindrical sputtering cathode is used for magnetron sputtering coating.
9、 Water cooling system is generally composed of cold water tower, chiller, water pump, etc
The pvd coating machine must be composed of the above nine parts, each of which plays a vital role in the machine.