During the use of pvd coating machine, maintenance is necessary, which is also a problem that engineers must master, because proper daily maintenance of equipment can increase the service life of equipment, thus reducing costs and increasing productivity. The following is a brief introduction to the maintenance of pvd coating machine. I hope it can help you:

1. The pvd coating machine shall clean the working room once after completing more than 200 coating procedures.

Methods: The wall of the vacuum chamber was repeatedly scrubbed with sodium hydroxide (NaOH) saturated solution. (Note that human skin should not directly contact the sodium hydroxide solution to avoid burns.) The purpose was to make the aluminum (AL) coated film react with NaOH. After the reaction, the film fell off and hydrogen was released. Then clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with a cloth dipped in gasoline.
2. When the crude pumping pump (slide valve pump, rotary vane pump) has been working continuously for one month (half in rainy season), it needs to be replaced with new oil.
Method: Unscrew the oil drain bolt, drain the old oil, and then start the pump for a few seconds to completely drain the old oil in the pump. Screw the oil return bolt and add new oil to the specified amount (oil sight glass observation). If it has been used continuously for more than half a year, open the oil cap when changing the oil and wipe the dirt in the box with a cloth.
3. Before restarting, pay attention to leak detection.
The diffusion pump has been used continuously for more than 6 months, and the pumping speed is obviously slow, or the operation is improper. Fill it into the atmosphere, remove the connecting water pipe, remove the electric furnace plate, screw out the primary nozzle, first clean the pump chamber and pump liner with gasoline, then wash them with washing powder and water, and then thoroughly clean them with clean water. After the water evaporates, install the pump liner, add new diffusion pump oil, and install them back into the body, connect the water pipe, and install the electric furnace plate, You can restart. Before restarting, pay attention to leak detection.
Method: Start the maintenance pump, close the door, and observe whether the vacuum degree of the diffusion pump reaches 6X10 Pa after a few minutes, otherwise, conduct leak detection. Check whether the sealing rubber ring is installed at the joint, or the sealing ring is damaged. Heating can be carried out only after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn the ring and the pvd coating machine cannot enter the working state.
pvd coating machine is widely used, so the models of pvd coating machine are also very complete. As the manufacturer of pvd coating machine, equipment maintenance procedures must be in place.