As the name implies, the pvd coating machine must operate under vacuum. Therefore, the pvd coating machine must be equipped with a vacuum coating system, which is composed of diffusion pump, molecular pump, roots pump, mechanical pump, screw pump, etc. The maintenance of the vacuum coating equipment is essential in the operation process. The diffusion pump is an important part of the pvd coating machine, so the maintenance of the diffusion pump is indispensable, The following is a brief introduction to the maintenance of diffusion pump of pvd coating machine. I hope it can help you:

1. During the operation of diffusion pump, the cooling water must be kept unblocked. After the heating is stopped, the cooling water can only be turned off after the working fluid of the pump has been completely cooled.
2. When the diffusion pump stops working, the pump shall be kept in a vacuum state to avoid deterioration of pump oil.
3. The extracted gas shall be dry, non corrosive and dust-free.
4. If the diffusion pump is not used for the time being, it should be kept in a vacuum state during storage to avoid pump oil pollution and corrosion of all parts, and to blow away the residual water from the cooling water jacket. Keep the room temperature of the site between 10-40 ℃.
5. The performance of diffusion pump will gradually deteriorate after long-term operation, so it should be checked regularly. For example, whether the pump oil is reduced or oxidized, add oil or replace according to the corresponding requirements; The parts and pump chamber shall be cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 ℃ or dried with an electric hair dryer. After treatment, assemble in sequence, keep the pump core and pump bottom vertical and concentric with the pump cavity, and adjust the nozzle clearance at all levels according to the original requirements.
6. After the water evaporates, install the pump core, add new diffusion pump oil, install it back into the body, connect the water pipe, install the electric furnace plate, and restart the machine.
7. Before restarting, pay attention to leak detection. The method is: start the maintenance pump, close the vacuum chamber door, and after a few minutes, observe whether the vacuum degree is 6 * 10 0 Pa, otherwise, conduct leak detection, and check whether the sealing rubber ring is missing or damaged at the connection. Heating can be carried out only after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn out and cannot enter the working state.
The above introduction is just the maintenance method of diffusion pump. The diffusion pump is only a part of the pvd coating machine. Therefore, to maintain the pvd coating machine, each part must be considered.