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Specific operation methods and steps of pvd machine

2023-01-15

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For specific operation of the pvd machine, please refer to the equipment manual and the indication under the indicator display and each knob of the instrument panel on the pvd machine:


pvd machine


1. Check whether the operation control switches of the pvd machine are in the "off" position.
2. Turn on the main power switch to power on the vacuum coating equipment.
3. The low-pressure valve is pulled out. Open the air charging valve. When the sound of air flow is not heard, start the bell jar valve and the bell jar will rise.
4. Install and fix the tungsten screw heater. Fix the PVDF film and aluminum cover plate on the rotating disc. Thread the aluminum wire into the spiral heater. Clean all parts of the bell housing to ensure that there are no impurities and dirt.
5. Lower the bell guard.
6. Start the vacuum mechanical pump of vacuum coating equipment.
7. Turn on the power of the composite vacuum gauge.
1) Turn the left knob "1" clockwise to the heating position pointing to section 2.
2) The pointer in the low vacuum gauge "2" moves clockwise. When the pointer moves to 110mA, the left knob "1" rotates to the measurement position pointing to section 2.
8. When the pointer in the low vacuum gauge "2" moves clockwise again to 6.7 Pa, the low pressure valve is pushed in. At this time, the left knob "1" is rotated to point to the measurement position of section 1.
9. Open cooling water for pvd machine, start diffusion pump and heat for 40min.
10. The low-pressure valve is pulled out. Repeat the ⑦ action procedure once: turn the lower left knob "1" to the measurement position pointing to section 2. The pointer in the low vacuum gauge "2" moves clockwise. When the pointer moves to 6.7 Pa, open the high pressure valve.
When the pointer in the low vacuum gauge "2" moves to the right to 0.1Pa, open the gauge filament switch.
1) The emission and zero point measurement button "9" is rotated to point to the emission position.
2) The lower left knob "1" is rotated to point to the measurement position of section 1.
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