When newcomers first enter the plant, the premise is to pass a series of professional training, including pvd coating machine operation process, vacuum deposition equipment leak detection problems, maintenance problems, and potential safety hazards. In this way, Cui Jinxin coating engineers can save time and quickly operate the machine. Today, Huicheng Vacuum will introduce the operation process of pvd coating machine, I hope it can help everyone:

Firstly, let me introduce the operation of the electric control cabinet to everyone. Each equipment operation has a process, and no step can be missed. (1) First, boil the water pump and air source. (2) Continue to turn on the main power supply. (3) Turn on the power supply of the maintenance pump and vacuum gauge, and set the vacuum gauge to position V1. Wait for its value to be less than 10 before proceeding to the next step of operation. It takes about 5 minutes. (4) Turn on the mechanical pump, pre pump, turn on the power supply of the turbomolecular pump, start, and switch the vacuum gauge switch to V2 position until the pump is less than 2, which takes about 20 minutes. (5) After observing the reading of the turbomolecular pump reaching 250, turn off the pump, open the front engine and high valve to continue vacuuming, and only after vacuuming to a certain extent can the high vacuum gauge on the right be opened to observe the vacuum degree. Vacuum reaches 2 × Only after 10-3 can the electronic gun power be turned on.
Second: Operation of the DEF-6B electronic gun power cabinet, (1) Turn on the main power supply. (2) Simultaneously turn on the electronic gun control I and electronic gun control II power supplies: Press the electronic gun control I power supply and delay switch, and the delay, power, and protection lights will light up. After three minutes, the delay and protection lights will go out. If the rear door is not closed properly or the water flow relay is faulty, the protection light will stay on. (3) Turn on the high voltage, and the high voltage will reach over 10KV. Adjust the beam current to around 200mA, the curtain grid to 20V/100mA, the filament current to 1.2A, and the deflection current to swing between 1-1.7.
Third: Shutdown sequence. (1) Turn off the vacuum gauge head and the molecular pump. (2) When the molecular pump reaches 50, turn off the high valve, front stage, and mechanical pump in sequence, which takes about 40 minutes. (3) When it reaches below 50, turn off the maintenance pump again.
The above are the operation steps of the pvd coating machine. When new people are ready to operate the machine, they must remember the operation process of the equipment, and do not miss any link. After a long time of operation, they will become professional engineers operating the coating equipment.