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New comers have to know about pvd coating machine

2023-05-08

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Before newcomers enter the industry, they must first understand some important knowledge of pvd coating machine, so that they can be integrated into the work more quickly. Here is a summary of pvd coating machine knowledge for everyone in detail:


pvd coating machine


pvd coating machine mainly refers to a kind of coating that needs to be carried out under high vacuum, including many kinds, including vacuum ion evaporation, Magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide it into two types: evaporation and sputtering. The substrate that needs to be coated is called the substrate, and the coated material is called the target material. The substrate and target are in the same vacuum chamber. Evaporative coating generally involves heating the target material to evaporate surface components in the form of atomic clusters or ions, which settle on the surface of the substrate and form a thin film through the film-forming process (scatter island structure stray structure layered growth). For sputtering coating, it can be simply understood as the use of electrons or high-energy lasers to bombard the target material, causing surface components to be sputtered out in the form of atomic clusters or ions, and ultimately deposited on the substrate surface. It undergoes the process of film formation, evaporation coating machine+product evaporation coating machine+product coating process, and finally forms a thin film.

What are the operation steps of the pvd coating machine? This is the most basic thing that newcomers must know, first of all
1) Boiling water pump, air source
2) Turn on the main power supply
3) Turn on the power supply of the maintenance pump and vacuum gauge, and set the vacuum gauge to position V1. Wait for its value to be less than 10 before proceeding to the next step of operation. It takes about 5 minutes.
4) Turn on the mechanical pump, pre pump, turn on the power supply of the turbomolecular pump, start, and switch the vacuum gauge switch to V2 position until the pump is less than 2, which takes about 20 minutes.
5) After observing the reading of the turbomolecular pump reaching 250, turn off the pump, open the front engine and high valve to continue vacuuming, and only after vacuuming to a certain extent can the high vacuum gauge on the right be opened to observe the vacuum degree. Vacuum reaches 2 × Only after 10-3 can the electronic gun power be turned on.

Operation of DEF-6B Electronic Gun Power Cabinet
1) Turn on the main power supply
2) Simultaneously turn on the electronic gun control I and electronic gun control II power supplies: Press the electronic gun control I power supply and delay switch, and the delay, power, and protection lights will light up. After three minutes, the delay and protection lights will go out. If the rear door is not closed properly or the water flow relay is faulty, the protection light will stay on.
3) Turn on the high voltage, and the high voltage will reach over 10KV. Adjust the beam current to around 200mA, the curtain grid to 20V/100mA, the filament current to 1.2A, and the deflection current to swing between 1-1.7.

Shutdown sequence
1) Turn off the vacuum gauge head and the molecular pump.
2) When the molecular pump reaches 50, turn off the high valve, front stage, and mechanical pump in sequence, which takes about 40 minutes.
3) When it reaches below 50, turn off the maintenance pump again.

Applicable scope of vacuum deposition equipment
1. Architectural hardware: bathroom hardware (such as faucets), door locks, door handles, bathroom, door locks, hardware hinges, furniture, etc.
2. Watch making industry: can be used for coating watch cases and straps, as well as crystal products.
3. Other hardware: leather hardware, stainless steel tableware, eyeglass frames, knives, molds, etc.
4. Large workpieces: car wheels, stainless steel plates, signs, sculptures, etc.
5. Stainless steel pipes and plates (various types of surfaces)
6. Furniture, lighting fixtures, hotel utensils
7. Hardware products such as locks, handles, bathroom hardware, golf heads, stainless steel tableware, and blood vessels are coated with superhard decorative film.
8. Glasses, jewelry, and other decorations are coated with ultra wear-resistant decorative (gold and silver) nano films, nano films, and nano laminated films.

Maintenance and upkeep methods
1. When the pvd coating machine completes more than 200 coating procedures, the working room should be cleaned once.

The method is to repeatedly scrub the vacuum chamber wall with a saturated solution of caustic soda (NaOH) (note that the human skin should not directly come into contact with the caustic soda solution to avoid burns), in order to cause the coated film material aluminum (AL) to react with NaOH, causing the film layer to peel off and release hydrogen gas after the reaction. Clean the vacuum chamber with clean water and clean the dirt inside the fine extraction valve with a cloth dipped in gasoline.

2. When the crude extraction pump (slide valve pump, rotary vane pump) operates continuously for one month (halved during the rainy season), new oil needs to be replaced.
The method is to unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds to completely drain the old oil inside the pump. Tighten the oil return bolt and add new oil to the specified amount (observe through the oil sight glass). If it has been used continuously for more than half a year, the oil cap should be opened and the dirt inside the box should be wiped clean with a cloth when changing the oil.

3. If the diffusion pump has been used continuously for more than 6 months and the pumping speed significantly slows down or the operation is improper, the atmosphere is filled, the connecting water pipe is removed, the electric furnace plate is removed, the first stage nozzle is screwed out, the pump chamber and pump chamber are first cleaned with gasoline, then washed with laundry detergent mixed with water, and then thoroughly cleaned with clean water. After the water evaporates, the pump chamber is installed, new diffusion pump oil is added, and the body is reinstalled. The water pipe is connected, and the electric furnace plate is installed, You can restart it. Before restarting, pay attention to leak detection work. The method is to start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum degree of the diffusion pump reaches 6X10 Pa, otherwise a leak detection is required. Check if there is a sealing ring installed at the connection or if the sealing ring is damaged. Heating can only be carried out after eliminating the risk of air leakage, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.
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