As pvd coating machine are used more and more widely, their requirements are higher and higher, and more and more people buy equipment, many problems will naturally arise in the process of use. The most frequently asked questions are about the maintenance of the machines. Now many manufacturers are not very clear about the maintenance of vacuum deposition equipment. When it is necessary to carry out maintenance, the result is that they have no way to start, which gives many manufacturers of vacuum deposition equipment a headache. Below, the vacuum editor will provide a detailed introduction to how to repair the machine and which methods?

First, the pvd coating machine shall clean the working room once after completing more than 200 coating procedures.
The method is to repeatedly scrub the vacuum chamber wall with a saturated solution of caustic soda (NaOH) (note that the human skin should not directly come into contact with the caustic soda solution to avoid burns), in order to cause the coated film material aluminum (AL) to react with NaOH, causing the film layer to peel off and release hydrogen gas after the reaction. Clean the vacuum chamber with clean water and clean the dirt inside the fine extraction valve with a cloth dipped in gasoline.
Secondly, when the crude extraction pump (slide valve pump, rotary vane pump) operates continuously for one month (halved during the rainy season), new oil needs to be replaced. The method is to unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds to completely drain the old oil inside the pump. Tighten the oil return bolt and add new oil to the specified amount (observe through the oil sight glass). If it has been used continuously for more than half a year, the oil cap should be opened and the dirt inside the box should be wiped clean with a cloth when changing the oil.
Thirdly, if the diffusion pump has been used continuously for more than 6 months and the pumping speed significantly slows down, or if the operation is improper, the atmosphere should be filled. The connecting water pipe should be removed, the electric furnace plate should be removed, and the first stage nozzle should be screwed out. First, the pump chamber and pump chamber should be cleaned with gasoline, and then washed with laundry detergent mixed with water. Then, thoroughly clean with clean water. After the water evaporates, install the pump chamber, add new diffusion pump oil, and reinstall the body. Connect the water pipe, and install the electric furnace plate, You can restart it. Before restarting, pay attention to leak detection work.