Vacuum coating by sputtering, due to the different coating methods, the effect of the film prepared by the same coating material will be different. Although it cannot be seen by the naked eye, it does have certain advantages.
The film thickness stability is good. Since the thickness of the sputtering coating film has a great relationship with the target current and discharge current, the higher the current, the greater the sputtering efficiency. In the same time, the thickness of the coating film is relatively large. Because as long as the current value is well controlled, it doesn’t matter how thick or thin the film layer needs to be plated. Of course, the thickness is within the allowable range, and the current is well controlled. No matter how many times the plating is repeated, the film thickness will not change. The stability of the film thickness can be attributed to the good controllability and repeatability of the film thickness.
The film layer has strong bonding force. During the sputtering process, some electrons hit the surface of the substrate, activate the surface atoms, and produce a cleaning effect. The energy obtained by sputtering is 1 higher than that obtained by evaporation. To 2 orders of magnitude, when the plating material atoms with such high energy hit the surface of the substrate, more energy can be transferred to the substrate, generating more heat energy, which accelerates the atoms activated by electrons, and partially The atoms of the plating material are fused with each other earlier, and other atoms of the plating material are subsequently deposited to form a film, which strengthens the bonding force between the film layer and the substrate.
The range of coating materials is wide, because the sputtering coating of
vacuum coating machine sputters the coating materials through the high-speed bombardment of argon ions, unlike evaporation coatings, which can only use coating materials with relatively low melting points due to the melting point, while sputtering Coating Almost all solid substances can be used as coating materials.
From the above points, it can be seen that the effect of sputtering vacuum coating is indeed better than that of evaporation vacuum coating. The difference in principle determines that the thickness of the film prepared by sputtering is more stable, the bonding force is stronger, and the range of coating materials is wider.