The processing methods of pvd coating machine with different processes are different. Inadvertent small faults may affect the normal operation of the whole machine and equipment. Problems need to be checked one by one. Experienced teachers can often solve many problems. Speaking of coating uniformity, this is one of the criteria for evaluating the quality of a pvd coating machine. In the process of machine coating, the coating of pvd coating machine is uneven, so it is necessary to check the problems that may affect the uniformity of the coating, and complete the detection and repair before mass production. The coating uniformity of all coating equipment will be affected by some conditions. Take Magnetron sputtering pvd coating machine as a brief example:

The work of Magnetron sputtering coating was not complicated before. It was a PVD physical process to decompose the target by equipping an efficient and stable sputtering source to bombard the target in a certain vacuum environment in the coating room. The decomposed target atoms deposited a film on the product surface through the process. During the reaction process, it is necessary to consider the influence of the uniformity of the magnetic field, the pressure holding situation of the vacuum environment, and the protective gas on the uniformity of the film layer. However, some uneven changes in the film layer may also be caused by the instability of the sputtering source or the target material, which is difficult to handle.

It should be noted that regardless of the accuracy of the built-in monitor of the coating equipment, it can only control the film thickness at a single point in the coating room, generally referring to the middle position of the product. By controlling the uniformity of the film layer at this base point, the uniformity of the product film layer far away from this base point is ensured.

The vacuum environment is controlled by pumping, and maintaining a stable vacuum requires precise detection and control systems. When the vacuum reaches the desired state, pumping needs to be stopped. If the vacuum is going to be lower than the desired state, timely pumping and stabilizing is necessary. There is a reasonable range of vacuum degree for coating, and the smaller the difference in this range, the greater the required accuracy, the more difficult the control is, and the relative voltage stabilization is better and more stable; The larger the difference in the interval range, the lower the accuracy, and the lower the requirements for the detection and control system. The relative pressure fluctuation is greater, and the impact on the uniformity of the film layer is greater.

In the past few years, more and more customers have higher and higher requirements for pvd coating machine, especially in film density and uniformity quality. For manufacturers of coating machines, improving their own technology is the guarantee of competitiveness.