I believe that colleagues have their own methods for leak detection of PVD coating vacuum coating machine. Dongguan Huicheng Vacuum Technology Co., Ltd. Research, Huicheng Vacuum experts said:
First of all, for PVD coated containers or devices that are being processed and manufactured, it is best to use the PVD coated bubble leak detection method. The PVD coating bubble leak detection method is to fill the inspected part with a leak-indicating gas of a certain pressure and then put it into the liquid. The PVD coating gas enters the surrounding liquid through the leak hole to form bubbles. The place where the PVD coating bubbles are formed is the leak hole. According to the bubble formation rate, the size of the bubble, and the physical properties of the gas and liquid used, the PVD coating can roughly estimate the leak rate of the leak.
PVD coating cover method: cover the whole device with a vinyl plastic bag (cover) for PVD coating, and then fill the bag with helium gas after PVD coating, that is, immerse the entire vacuum container in helium for leak detection. PVD coating pressure rise method, after fully pumping, close the main valve, rough pumping valve and air leakage valve, and use the change of pressure rise in the B-A ionization vacuum gauge to determine whether there is air leakage.
The coating of
PVD coating vacuum coating machine is the sum of the pressure rise caused by air leakage and the pressure rise caused by material degassing, and finally it is a linear rise proportional to time. When the PVD coating curve shows the above state, it indicates that the device is leaking. The PVD coating vacuum coating machine has no leakage, only the material deflates, and the curve should be in a saturated state; when there is no material deflation and only leaks, it will be a straight line proportional to time from the beginning.