The vacuum target chamber structure of thev pvd coating machine prototype device consists of a spherical shell with multiple windows in diameter and thickness, a vacuum target chamber support frame, a terminal optical component, a high-precision target support adjustment component, a high-precision target positioning monitor, and a It is composed of various physical parameter diagnostic measuring instruments on the spherical shell of the target chamber and auxiliary support frames connected with the terminal optical components.

Vacuum target chamber transition disk; vacuum target chamber adjustment components; 1-vacuum target chamber supporting steel frame. Among them, the supporting legs and the auxiliary supporting frame of the terminal optical system are adopted. In order to avoid too many local modes, they are replaced by rigid entities during modeling; in order to simplify the model, the solid equivalent of uniform density is used for the terminal optical components, etc., so that the simplification has little effect on the results. In the model for analyzing the roundness error of the target chamber, only a special case is considered, that is, the maximum roundness error, and the target chamber is an ellipsoid, with its short axis in the direction and the long axis in the direction. The coordinate system is defined as: the coordinate origin is at the center of the target room, the positive direction is from west longitude to east longitude, and the positive direction is from south latitude to north latitude. The positive direction is determined by the right-hand rule, and the axis is perpendicular to the equator. noodle.
        Calculation and analysis results In the static calculation of the target chamber, the maximum translational displacement of the target chamber is not much different before and after vacuuming, indicating that the structural deformation of the target chamber in static state is mainly affected by its own weight; add auxiliary support to the terminal optical system After that, the maximum translational displacement of the target chamber becomes slightly smaller; in the case of a special roundness error considered by the author, the maximum translational displacement of the target chamber becomes slightly smaller. Calculation results of static analysis of the target chamber Actual measurement results Measurement method The intersection of two pairs of orthogonal flange centerlines on the equatorial plane of the target chamber is used as the center of the target chamber, and the target ball is placed at . Place a reflector at the feature point of interest, point the laser light from the laser at the feature point, and use a goniometer to observe the relative position change of the point during the process of repeatedly vacuuming and deflation of the target chamber, and then the feature of interest can be obtained Deformation data for points.
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