The air tightness detection of vacuum coating electro-vacuum devices is based on the structure and principle of the helium mass spectrometer leak detector, and a leak detection platform suitable for the air tightness detection of electric vacuum devices is designed. The structural characteristics and measurement accuracy requirements of electric vacuum devices determine that the helium cover method and the injection method are the most commonly used methods in the helium mass spectrometry leak detection technology of electric vacuum devices. The helium cover method is used to measure the total leak rate. The blowing method accurately locates the leak hole. The location of the double-loop complex structure and complex serial leaks shows that the influence factors of the helium mass spectrometry injection method in the leak detection of electric vacuum devices must follow the principle of injection leak detection. At the same time, factors such as temperature, temporary sealing materials, and equipment material adsorption will cause certain measurement errors.

Vacuum air tightness is one of the main factors affecting the performance and life of microwave tubes, so vacuum leak detection is an important process for reliability assurance in the manufacturing process of vacuum electronic devices. The characteristics of electric vacuum devices and the requirements of leak rate value determine that the leak detection method of helium mass spectrometry is mainly used for the air tightness detection. Helium mass spectrometry detection technology has been widely used in aviation, aerospace, automobile and electric vacuum industries due to its quantifiable leak rate, high sensitivity, fast speed, safe use and wide application range. pvd coating machine leak detection Compared with many other traditional leak detection methods, helium mass spectrometry leak detection has incomparable technical superiority. The helium mask method and the injection method are the two most commonly used methods in the helium mass spectrometry leak detection technology of electric vacuum devices. The helium hood method is to measure the total leak rate, and when the total leak rate exceeds the allowable value, use the injection method to accurately locate the leak hole. At present, there are few literatures that systematically study the leak detection technology of helium mass spectrometry in electric vacuum devices