Usually know little about the vacuum industry procurement personnel, this aspect is almost a blank, but the general procurement of
pvd coating machine, basically are coating processing plants, because of the vacuum coating equipment and evaporation film conditions more or less have some understanding, then vacuum coating machine evaporation film process evaporation conditions are what, The following vacuum small series for you to introduce in detail, I hope to help you:
1) Evaporation characteristics of substances under vacuum conditions
When the film is heated to a certain temperature, vaporization will occur, that is, from the solid phase or liquid phase into the gas phase, because the evaporation of the material under vacuum conditions is much easier than under normal pressure, so the required evaporation temperature will be greatly reduced, the melting evaporation process will be greatly shortened, and the evaporation efficiency of the pvd coating machine will be significantly improved. Taking metal aluminum as an example, at one atmospheric pressure, aluminum must be heated to 2400 ° C to evaporate, but if it is heated to 847 ° C under vacuum conditions of 10-3Pa, it can be evaporated in large quantities.
2) Evaporation rate of film material
The evaporation rate of the film material refers to the number of molecules evaporated from the surface of the unit film material (square centimeters) in the form of steam in a unit time (seconds).
3) Collision rate of residual gas on substrate
After the film evaporates, the residual gas molecules collide with the substrate during the process of migration and deposition. Some of these residual gas molecules are reflected into the gaseous space after colliding with the substrate surface, and some are absorbed by the deposition film layer, which is very unfavorable to the formation of the film.
4) Condensation rate of film material
After the film material is heated and evaporated by the vacuum coating machine, the number of molecules on the unit area of the substrate in the unit time is called the condensation rate of the film material. The condensation rate of pvd coating machine is related to the emission characteristics of the evaporation source, the geometry of the source and the substrate and the distance between the source and the substrate (evaporation distance), so it must be closely calculated and comprehensively measured when designing the coating chamber and selecting the evaporation source.
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