In order to minimize the influence of the vacuum chamber deformation of the pvd coating machine, we fixed the guide rail, screw and other transmission parts on a rigid intermediate layer, and used point, line and surface active supports between them and the bottom wall of the vacuum chamber to absorb and isolate the deformation, and set the deformation compensation adjustment mechanism. Before the system vacuumed, the appropriate compensation amount was preset according to the theoretical data provided by the finite element calculation. To reach equilibrium in a vacuum.

In order to verify the results of finite element calculation, the deformation and compensation of vacuum chamber are tested. In the first step, the four dial gauges are positioned on the outside of the vacuum wall of the workbench installation base point, when the vacuum chamber is pumped from the atmosphere to the vacuum, the change of each dial gauge is recorded, and the deformation compensation is adjusted by the laser autocollimator after normalization. A laser beam is sent out by the horizontally adjusted autocollimator through the glass window of the vacuum chamber to illuminate the mirror fixed on the work table, and the deformation compensation adjustment mechanism is adjusted under the atmospheric environment, so that the reflected beam enters the receiving field of view of the autocollimator and records the two-dimensional Angle deviation. The compensation amount in the vacuum state calculated by the finite element method (or measured in the first step) is adjusted again. Obviously, the reflected light beam at this time is far away from the receiving field of view of the autocollimator, but once the vacuum chamber enters the vacuum state, the reflected light beam re-enters the receiving field of the autocollimator and records the two-dimensional Angle deviation at this time. The two dimensional Angle deviation of the two displays is basically consistent.
The scanning of the table is a frequent movement in the vacuum chamber environment, in addition to rolling instead of sliding to reduce the friction coefficient, good lubrication between the guideway, screw and other moving pairs is a necessary condition to ensure the normal operation of the etching device for a long time. The way of lubrication in vacuum usually includes plating solid lubrication film and direct use of lubricant, and the coating is easy to destroy the motion accuracy of the guide rail, and the process is complicated. To this end, we tested the lubrication effect of a kind of market commodity - molybdenum disulfide lubricant, sprayed the lubricant directly on the surface of the moving pair, and analyzed the main components of the gas volatilized by the lubricant in vacuum with a quadrupole mass spectrometer.
The influence of vacuum chamber deformation is huge, which will directly affect the service life and coating quality of the pvd coating machine, thereby increasing the cost of coating, and will also cause serious losses to the pvd coating machine, so this factor is particularly important for everyone to pay attention to.