Diamond like carbon (DLC) coating machine
This series of machine has a variety of DLC coating deposition technology and modular coating machine design. According to the application requirements of customer products, it can filter cathode arc, closed field magnetron sputtering, PACVD and ion source technology modules for DLC deposition machine, which are suitable for a variety of scientific research, product development and mass production requirements. Advanced technology, convenient operation, less energy consumption, green environmental protection and other characteristics, widely used in machinery, electronics, optics, energy, decoration and other fields.
The DLC coating developed by HCVAC has good adhesion, high hardness and wear resistance, low friction coefficient and low surface roughness. It can deposit DLC coating on the surface of various metal and alloy tools and parts. The unique low temperature coating technology can also be used to deposit DLC coating on high temperature resistant materials such as plastics.
DLC coating has high hardness, excellent friction and wear resistance, high thermal conductivity, low dielectric constant, wide band gap, good optical permeability, excellent chemical inertness and biocompatibility. It has broad application prospects in aerospace, mechanical, electronic, optical, decorative appearance protection, biomedical and other fields. DLC coating is suitable for wear and sliding environment. It can reduce friction loss without any lubricating medium. It can be used in many fields such as automotive engine parts (fuel injection system, power transmission system), bearings, rollers, textile machinery, aerospace and other fields.
DLC coating (DLC coating) prepared by DLC coating machine has stable quality, good adhesion with substrate, good wear resistance, low friction coefficient and good corrosion resistance. It is widely used in engine parts, non-ferrous metal cutting tools, non-ferrous metal and stainless steel forming stamping die, sliding sealing parts, semiconductor industry mold, injection mold, textile industry and so on.
For different industries, and according to different requirements and materials of customers, we use different processes and preparation methods to design suitable DLC coating machine to meet the needs of customers.
DLC coating features:
1. It is a good self-lubricating coating for plastic processing;
2. The deposited film is 1-3 μ m and the hardness is 2000hv-2500hv;
3. It has excellent friction and wear properties, high temperature resistance of 350 ℃, and high resistance to adhesive and abrasive wear;
4. Rapid and predictable demoulding greatly improves quality and productivity, and is the first choice for PECVD coated plastics processing.
Main modules | |
Arc | HiPIMS |
The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures. Benefits: ●High target utilisation result in low target costs ●High deposition rates ●Adjustable magnetic fields ●Short target changing times ●High plasma density ●Reduction of macro-particles ●Excellent coating adhesion |
HiPIMS stands for High-Power Impulse Magnetron Sputtering. Benefits: ●High ionisation rate (similar to arc) ●High power densities from 100 to 1000 W/cm2 ●Very high plasma density ●Layer structures adjustable by plasma parameter settings ●Very smooth coatings ●Excellent coating adhesion ●Deposition of dense coatings at low substrate temperatures |
Additional modules | |
Sputter | Nitriding |
In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate. Benefits: ● A wide range of materials can be sputtered ● Diverse process variants available ● Smooth coatings ● Good coating adhesion on combination with power etching prozess AEGD |
With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating. Benefits: ● Optimisation of tool and component properties ● Substitution of expensive base materials ● Significantly longer lifetimes ● All PVD coatings can be applied |
DLC | ta-C |
DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings. Benefits: ● Excellent coating adhesion ● High wear resistance ● Low coefficient of friction ● Smooth coatings |
ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced. Benefits: ● For higher temperature environments than DLC ● Very high wear resistance ● Excellent coating adhesion ● Smooth coatings |