Load-lock type Sputtering System Compact multifunctional sputtering coating machine
Load-lock type Sputtering System Characteristic:
Redesign ease of use by leveraging traditional process data and proprietary technology
Increase productivity by installing a box mechanism (optional) in the load locking chamber
Support multi cathode stacking / simultaneous sputtering
The labor-saving operation is realized through the automatic processing of touch panel and formula input
Data recording is possible
Application:
Electrode film forming / multilayer electrode and simultaneous film forming applications
Dielectric film forming, insulating film, passivation, protective film, etc.
Used for R & D and small-scale production of electronic components
| Main modules | |
| Arc | HiPIMS |
|
The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures. Benefits: ●High target utilisation result in low target costs ●High deposition rates ●Adjustable magnetic fields ●Short target changing times ●High plasma density ●Reduction of macro-particles ●Excellent coating adhesion |
HiPIMS stands for High-Power Impulse Magnetron Sputtering. Benefits: ●High ionisation rate (similar to arc) ●High power densities from 100 to 1000 W/cm2 ●Very high plasma density ●Layer structures adjustable by plasma parameter settings ●Very smooth coatings ●Excellent coating adhesion ●Deposition of dense coatings at low substrate temperatures |
| Additional modules | |
| Sputter | Nitriding |
|
In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate. Benefits: ● A wide range of materials can be sputtered ● Diverse process variants available ● Smooth coatings ● Good coating adhesion on combination with power etching prozess AEGD |
With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating. Benefits: ● Optimisation of tool and component properties ● Substitution of expensive base materials ● Significantly longer lifetimes ● All PVD coatings can be applied |
| DLC | ta-C |
|
DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings. Benefits: ● Excellent coating adhesion ● High wear resistance ● Low coefficient of friction ● Smooth coatings |
ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced. Benefits: ● For higher temperature environments than DLC ● Very high wear resistance ● Excellent coating adhesion ● Smooth coatings |
