HCEE series

E-beam evaporation

Large optical coater

Vacuum Application Solution Supplier
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Large E-Beam optical coating machine

Equipped with electron gun, cavity type, waist type or ring crucible, impedance type evaporation source; equipped with optical film thickness controller or quartz crystal film thickness controller, it can realize automatic control of film forming speed and coating process; optional RF / Kaufman / hall type ion source.

The development of the series is to meet the market demand for large-scale production. The machine has been verified by production, with high productivity and the lowest cost of ownership. The cost of mass optical elements is optimized. AR, UV / IR cut-off filter, AF, hard film, decorative film, ITO film, band-pass filter, HR film can be prepared.

AR ilm (substrate glass transmittance > 91.5%):
■  In 420-680nm band, the average transmittance of one side is more than 95%, and the reflectivity is less than 0.5 (average);
■  The average transmittance on both sides is more than 98%, and the reflectivity is less than 0.5 (average);

AS/AF membrane test standard:
■   The range of initial contact angle is 115 ± 5 °;
■   Friction resistance test standard of steel wool: use 0000 × 10 mm steel wool, area is 10 * 10 mm, travel 40 times / min, load 1kg, after 5000 times of back and forth friction, contact angle is greater than 100 °;
■   Test standard of eraser: 6mm diameter eraser, 25 strokes / min, 1kg load, 2500 round-trip friction, contact angle greater than 100 °;
Note: the test sample glass shall be the touch screen cover plate special glass after precision polishing, with smooth surface.

Product Advantage.

HCEE series large electron beam evaporation coater includes the following key capabilities:
  • High productivity

    Meet the market demand of mass production

  • Customization

    Multiple component combinations to meet customer needs

  • Simple

    Easy to operate and maintain

  • Currency

    High performance, high throughput

  • Automation

    Automatic evaporation control system to realize automatic evaporation process

  • Remote access

    Provide factory remote diagnostics

Mode HCEB-2700
Size(mm) Φ2700 x H1850
Structure Vertical Chamber with single Door, SUS304 Stainless Steel
Wavelength 380nm~780nm
Rotational speed 0~30RPM (variable)
Pumping speed Atmospheric pressure to 2.0×10-3Pa less than 30min
Ultimate vacuum 8.0×10-5Pa
Coating material Tio2,Ti3o5,H4,Zro2,Zns,Al2o3,Mgf2,Sio2,Au,Ag,Cu,Al,Ti,In,Sn...
Jig Unit Single or split DOME
Heater Micro-sheath, Up to 250℃
Vacuum Unit Low Vacuum Pump + High Vacuum Pump + Polycold
Vacuum Controller Vacuum Controller, Penning Gauge, Pirani Gauge
Coating Unit E-type E-Beam Source(270°Deflection) with Hole-shape, Waist-shape or Annular Crucibles &. 10KW Power Supply.Thermal Source Available. RF / Kauffman-type I-beam / End-hall-type Source.
Charge Unit MFC or APC Automatic pressure controller
Thickness Controller Crystal Control or Optical Control
Controller Industrial PC + PLC + TP
Application AR, UV/IR Cut Filter, AF, Hard Coating, Decorative Coating, ITO Coating, Band Pass Filter, HR Coating, etc.
Remark: Customization
Mode HCEB-2350
Size(mm) Φ2350 x H1510
Structure Vertical Chamber with single Door, SUS304 Stainless Steel
Wavelength 380nm~780nm
Rotational speed 0~30RPM (variable)
Pumping speed Atmospheric pressure to 2.0×10-3Pa less than 30min
Ultimate vacuum 8.0×10-5Pa
Coating material Tio2,Ti3o5,H4,Zro2,Zns,Al2o3,Mgf2,Sio2,Au,Ag,Cu,Al,Ti,In,Sn...
Jig Unit Single or split DOME
Heater Micro-sheath, Up to 250℃
Vacuum Unit Low Vacuum Pump + High Vacuum Pump + Polycold
Vacuum Controller Vacuum Controller, Penning Gauge, Pirani Gauge
Coating Unit E-type E-Beam Source(270°Deflection) with Hole-shape, Waist-shape or Annular Crucibles &. 10KW Power Supply.Thermal Source Available. RF / Kauffman-type I-beam / End-hall-type Source.
Charge Unit MFC or APC Automatic pressure controller
Thickness Controller Crystal Control or Optical Control
Controller Industrial PC + PLC + TP
Application AR, UV/IR Cut Filter, AF, Hard Coating, Decorative Coating, ITO Coating, Band Pass Filter, HR Coating, etc.
Remark: Customization
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