Electron gun technology can be used for optical quality dielectrics, high rate metallization and TCO, and for high rate deposition in demanding production environments. With the help of complete two-dimensional digital beam scanning and the ability to control residence time, speed and focus, they provide the highest possibility of process control for even the most sensitive materials.
With the support of Huicheng vacuum process knowledge, the crucible size and quantity can be customized to meet the personalized needs of customers. For applications requiring the highest material purity, syn vacuum offers special models with removable covers.
Function:
● HC series gun body with longitudinal or full digital beam sweeping
● Custom source design for larger crucibles and up to 60 containers
● Process control of quartz and optical monitoring
● The enhanced control technology is used for code position management and control, and 4 quartz monitoring heads can be managed at the same time
● Piad has reliable, low maintenance cost technology, and can be used for films with stable optical and environmental properties